Search Results - 山田, 泰美

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    SiOx薄膜合成におけるリモート酸素プラズマの効果

    SiOx薄膜合成におけるリモート酸素プラズマの効果 by 山田, 泰美, 田坂, 茂, 稲垣, 訓宏

    Published in 高分子論文集
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    Effect of Remote Oxygen-Plasma for SiOx Film Preparation

    Effect of Remote Oxygen-Plasma for SiOx Film Preparation by YAMADA, Yasumi, TASAKA, Shigeru, INAGAKI, Norihiro

    Published in KOBUNSHI RONBUNSHU
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