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Search Results - 林旺 阮育娇 陈松岩 李成 赖虹凯 黄巍
Search Results - 林旺 阮育娇 陈松岩 李成 赖虹凯 黄巍
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The impact of polishing on germanium-on-insulator substrates
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林旺 阮育娇 陈松岩 李成 赖虹凯 黄巍
Published in
Journal of semiconductors
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Journal Of Semiconductors
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半导体学报:英文版
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Subjects
Bonding
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Bonding Strength
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Chemical-Mechanical Polishing
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Condensed Matter Physics
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Crystals
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Electrical And Electronic Engineering
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Electronic, Optical And Magnetic Materials
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Germanium
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Germanium-On-Insulator
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Materials Chemistry
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Mechanical Polishing
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Physical Sciences
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Physics
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Physics, Condensed Matter
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Polishing
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Science & Technology
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Semiconductors
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Wafer Bonding
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X射线衍射
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化学机械抛光
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Institute Of Physics
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Institute Of Physics Iop Science Extra
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