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Search Results - 董瑛 高伟 郑义 尤政
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Electrothermal Driving Microcantilever Resonator as a Platform for Chemical Gas Sensing
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董瑛 高伟 郑义 尤政
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Tsinghua science and technology
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Tsinghua Science And Technology
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Driving
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Electrothermal Driving
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Gas Sensor
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Gas Sensors
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Integrated Circuits
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Microcantilever
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Platforms
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Resonator
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Resonators
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Soi晶圆
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Volatile Organic Component
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Volatile Organic Compounds
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Voltage
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Wafers
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微悬臂梁
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挥发性有机化合物
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气体传感器
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电热化学
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聚合物涂层
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谐振器
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