Search Results - 赵继聪 袁泉 王凤祥 阚骁 韩国威 孙玲 孙海燕 杨晋玲 杨富华

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    Design and characterization of a 3D encapsulation with silicon vias for radio frequency micro-electromechanical system resonator

    Design and characterization of a 3D encapsulation with silicon vias for radio frequency micro-electromechanical system resonator by 赵继聪 袁泉 王凤祥 阚骁 韩国威 孙玲 孙海燕 杨晋玲 杨富华

    Published in Chinese physics B
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