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RF sputter를 이용한 실리카 증착 고 내구성 반사 방지막 제조
by
전성권(Seong-Gwon Jeon)
,
정은욱(Eun-Uk Jeong)
,
나종주(Jong-Joo Rha)
,
권정대(Jung-Dae Kwon)
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Biuletyn Uniejowski
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Biuletyn Uniejowski
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한국표면공학회지
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한국표면공학회지, 52
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기계공학
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