Search Results - 염근영(Geun-Young Yeom)

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  1. 1
    반도체 메모리 소자 제조에서 High Aspect Ratio Contact 식각 연구 동향

    반도체 메모리 소자 제조에서 High Aspect Ratio Contact 식각 연구 동향 by 탁현우(Hyun-Woo Tak), 박명호(Myeong-Ho Park), 이준수(Jun-Soo Lee), 최찬혁(Chan-Hyuk Choi), 김봉선(Bong-Sun Kim), 장준기(Jun-Ki Jang), 김은구(Eun-Koo Kim), 김동우(Dong-Woo Kim), 염근영(Geun-Young Yeom)

    Published in Biuletyn Uniejowski
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  2. 2
    A review : atomic layer etching of metals

    A review : atomic layer etching of metals by Yun Jong Jang, Hong Seong Gil, Gyoung Chan Kim, Ju Young Kim, Chang Woo Park, Do Seong Pyun, Ji Yeon Lee, Geun Young Yeom

    Published in Biuletyn Uniejowski
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  3. 3
    Study of hydrogenated silicon thin film deposited by using dual-frequency inductively-coupled plasma-enhanced chemical-vapor deposition

    Study of hydrogenated silicon thin film deposited by using dual-frequency inductively-coupled plasma-enhanced chemical-vapor deposition by Jeong, Ho Beom, Kim, Kyong Nam, Lee, Nae Eung, Yeom, Geun Young

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  4. 4
    Analysis and modeling of the optical endpoint signal for precision etching

    Analysis and modeling of the optical endpoint signal for precision etching by Kim, Yong Jin, Kim, Kyong Nam, Yeom, Geun Young

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  5. 5
    Study of atmospheric pressure chemical vapor deposition by using a double discharge system for SiOx thin-film deposition with a HMDS/Ar/He/O2 gas mixture

    Study of atmospheric pressure chemical vapor deposition by using a double discharge system for SiOx thin-film deposition with a HMDS/Ar/He/O2 gas mixture by Kim, Ga Young, Park, Jae Beom, Yeom, Geun Young

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