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Search Results - AJMERA, Hiral M
Search Results - AJMERA, Hiral M
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Deposition of WNxCy thin films for diffusion barrier application using the dimethylhydrazido (2―) tungsten complex (CH3CN)Cl4W(NNMe2)
by
AJMERA, Hiral M
,
ANDERSON, Timothy J
,
KOLLER, Jürgen
,
MCELWEE-WHITE, Lisa
,
NORTON, David P
Published in
Thin solid films
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Synthesis and Characterization of Diorganohydrazido(2–) Tungsten Complexes
by
Koller, Jürgen
,
Ajmera, Hiral M
,
Abboud, Khalil A
,
Anderson, Timothy J
,
McElwee-White, Lisa
Published in
Inorganic chemistry
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Tungsten Allylimido Complexes Cl4(RCN)W(NC3H5) as Single-Source CVD Precursors for WNxCy Thin Films. Correlation of Precursor Fragmentation to Film Properties
by
BCHIR, Omar J.
,
GREEN, Kelly M.
,
AJMERA, Hiral M.
,
ZAPP, Elizabeth A.
,
ANDERSON, Timothy J.
,
BROOKS, Benjamin C.
,
REITFORT, Laurel L.
,
POWELL, David H.
,
ABBOUD, Khalil A.
,
MCELWEE-WHITE, Lisa
Published in
Journal of the American Chemical Society
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Deposition of WNxCy from the Tungsten Piperidylhydrazido Complex Cl4(CH3CN)W(N-pip) as a Single-Source Precursor
by
Kim, Dojun
,
Hyun Kim, Oh
,
Ajmera, Hiral M.
,
Anderson, Tim
,
Koller, Jürgen
,
Abboud, Khalil A.
,
McElwee-White, Lisa
Published in
Journal of the Electrochemical Society
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Deposition of WN x C y thin films for diffusion barrier application using the dimethylhydrazido (2 −) tungsten complex (CH 3CN)Cl 4W(NNMe 2)
by
Ajmera, Hiral M.
,
Anderson, Timothy J.
,
Koller, Jürgen
,
McElwee-White, Lisa
,
Norton, David P.
Published in
Thin solid films
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Deposition of WN[sub x]C[sub y] Using the Allylimido Complexes Cl[sub 4](RCN)W(NC[sub 3]H[sub 5]): Effect of NH[sub 3] on Film Properties
by
Ajmera, Hiral M.
,
Heitsch, Andrew T.
,
Bchir, Omar J.
,
Norton, David P.
,
Reitfort, Laurel L.
,
McElwee-White, Lisa
,
Anderson, Timothy J.
Published in
Journal of the Electrochemical Society
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Tungsten Allylimido Complexes Cl 4 (RCN)W(NC 3 H 5 ) as Single-Source CVD Precursors for WN x C y Thin Films. Correlation of Precursor Fragmentation to Film Properties
by
Bchir, Omar J.
,
Green, Kelly M.
,
Ajmera, Hiral M.
,
Zapp, Elizabeth A.
,
Anderson, Timothy J.
,
Brooks, Benjamin C.
,
Reitfort, Laurel L.
,
Powell, David H.
,
Abboud, Khalil A.
,
McElwee-White, Lisa
Published in
Journal of the American Chemical Society
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Tungsten Allylimido Complexes Cl4(RCN)W(NC3H5) as Single-Source CVD Precursors for WN x C y Thin Films. Correlation of Precursor Fragmentation to Film Properties
by
Bchir, Omar J
,
Green, Kelly M
,
Ajmera, Hiral M
,
Zapp, Elizabeth A
,
Anderson, Timothy J
,
Brooks, Benjamin C
,
Reitfort, Laurel L
,
Powell, David H
,
Abboud, Khalil A
,
McElwee-White, Lisa
Published in
Journal of the American Chemical Society
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Deposition of W N x C y for diffusion barrier application using the imido guanidinato complex W ( N i Pr ) Cl 3 [ Pr i N C ( N Me 2 ) N i Pr ]
by
Ajmera, Hiral M.
,
Heitsch, Andrew T.
,
Anderson, Timothy J.
,
Wilder, Corey B.
,
Reitfort, Laurel L.
,
McElwee-White, Lisa
,
Norton, David P.
Published in
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena
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Deposition of WNxCy for diffusion barrier application using the imido guanidinato complex W(NiPr)Cl3[PriNC(NMe2)NiPr]
by
Ajmera, Hiral M.
,
Heitsch, Andrew T.
,
Anderson, Timothy J.
,
Wilder, Corey B.
,
Reitfort, Laurel L.
,
McElwee-White, Lisa
,
Norton, David P.
Published in
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena
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