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    Patterning-induced image placement distortions on electron beam projection lithography membrane masks

    Patterning-induced image placement distortions on electron beam projection lithography membrane masks by Lercel, Michael, Magg, Christopher, Lawliss, Mark, Williams, Carey, Caldwell, Neal, Ackel, Robin, Kindt, Louis, Racette, Kenneth, Reu, Phillip, Engelstad, Roxann, Mackay, R. Scott

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