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Simulation of electron beam lithography of nanostructures
by
Stepanova, M.
,
Fito, T.
,
Szabó, Zs
,
Alti, K.
,
Adeyenuwo, A. P.
,
Koshelev, K.
,
Aktary, M.
,
Dew, S. K.
Published in
Journal of vacuum science and technology. B, Nanotechnology & microelectronics
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Density multiplication of nanostructures fabricated by ultralow voltage electron beam lithography using PMMA as positive- and negative-tone resist
by
Adeyenuwo, Adegboyega P.
,
Stepanova, Maria
,
Dew, Steven K.
Published in
Journal of vacuum science and technology. B, Nanotechnology & microelectronics
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Journal Of Vacuum Science & Technology B, Nanotechnology And Microelectronics: Materials, Processing, Measurement, And Phenomena
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Journal Of Vacuum Science & Technology. B, Microelectronics And Nanometer Structures Processing, Measurement And Phenomena
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Journal Of Vacuum Science And Technology. B, Nanotechnology & Microelectronics
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American Institute Of Physics:jisc Collections:transitional Journals Agreement 2021-23 (Reading List)
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