Search Results - Ahearn, W.J.

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    Atomic layer deposition of TaSix thin films on SiO2 using TaF5 and Si2H6

    Atomic layer deposition of TaSix thin films on SiO2 using TaF5 and Si2H6 by Lemonds, A M, Bolom, T, Ahearn, W J, Gay, D C, White, J M, Ekerdt, J G

    Published in Thin solid films
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  2. 2
    Atomic layer deposition of TaSi x thin films on SiO 2 using TaF 5 and Si 2H 6

    Atomic layer deposition of TaSi x thin films on SiO 2 using TaF 5 and Si 2H 6 by Lemonds, A.M., Bolom, T., Ahearn, W.J., Gay, D.C., White, J.M., Ekerdt, J.G.

    Published in Thin solid films
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