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Safer alternative liquid germanium precursors for relaxed graded SiGe layers and strained silicon by MOVPE
by
Shenai, Deo V.
,
DiCarlo, Ronald L.
,
Power, Michael B.
,
Amamchyan, Artashes
,
Goyette, Randall J.
,
Woelk, Egbert
Published in
Journal of crystal growth
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Designing novel organogermanium OMVPE precursors for high-purity germanium films
by
Woelk, Egbert
,
Shenai-Khatkhate, Deodatta V.
,
DiCarlo, Ronald L.
,
Amamchyan, Artashes
,
Power, Michael B.
,
Lamare, Bruno
,
Beaudoin, Grégoire
,
Sagnes, Isabelle
Published in
Journal of crystal growth
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GC/MS analyses of MOVPE precursors and characterization of impurities in trimethylindium, trimethylaluminum and bis(cyclopentadienyl)magnesium
by
Grant, William B.
,
Amamchyan, Artashes
,
Stennick, Robert S.
,
Shenai, Deo V.
Published in
Journal of crystal growth
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Journal Of Crystal Growth
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Subjects
Cross-Disciplinary Physics: Materials Science; Rheology
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Crystallography
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Exact Sciences And Technology
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Materials Science
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Materials Science, Multidisciplinary
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Methods Of Deposition Of Films And Coatings; Film Growth And Epitaxy
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Physical Sciences
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Physics
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Physics, Applied
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Science & Technology
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Technology
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Vapor Phase Epitaxy; Growth From Vapor Phase
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A1. Characterization
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2
A3. Metalorganic Vapor Phase Epitaxy
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B2. Semiconducting Gallium Arsenide
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B2. Semiconducting Germanium
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A3. Metalorganic Vapor-Phase Epitaxy
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A3. Organometallic Vapor Phase Epitaxy
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A3. Organometallic Vapor-Phase Epitaxy
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B1. Bismagnesium
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Sciencedirect
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Sciencedirect Freedom Collection
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Backfile Package - Materials Science [Yms]
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Backfile Package - Physics General (Legacy) [Ypa]
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