Search Results - Aminpur, Massud

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    A Systematic Study on BEOL Defectivity Control for Future AI Application

    A Systematic Study on BEOL Defectivity Control for Future AI Application by Chen, James H.-C., Lie, Fee li, DeVries, Scott, Boye, Carol, Mehta, Sanjay, Devarajan, Thamarai S., Silvestre, Mary-Claire, Tseng, Wei-Tsu, Aminpur, Massud A

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    Silicon dry etching in hydrogen iodide plasmas : Surface diagnostics and technological applications

    Silicon dry etching in hydrogen iodide plasmas : Surface diagnostics and technological applications by RICHTER, H. H, AMINPUR, M.-A, ERZGRÄBER, H. B, WOLFF, A, KRÜGER, D, DEHOFF, A, REETZ, M

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    Strategies for single patterning of contacts for 32nm and 28nm technology

    Strategies for single patterning of contacts for 32nm and 28nm technology by Morgenfeld, B., Stobert, I., Haffner, H., An, J., Kanai, H., Ostermayr, M., Chen, N., Aminpur, M., Brodsky, C., Thomas, A.

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    Silicon Trench Etch Uniformity Improvement for Microloading and Macro-to-Macro Loading for sub-14nmNode

    Silicon Trench Etch Uniformity Improvement for Microloading and Macro-to-Macro Loading for sub-14nmNode by Yang, Yong Mo, Lim, Sang Woo, Hong, Junsic, Park, Mira, Yang, Yinxiao, Cho, Wang Keun, Adams, Charlotte, Aminpur, Massud, Maeng, Chang Ho

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