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Stacking technology for a space constrained microsystem
by
Heschel, M.
,
Kuhmann, J.F.
,
Bouwstra, S.
,
Amskov, I.
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Stacking Technology for a Space Constrained Microsystem
by
Heschel, M.
,
Kuhmann, J. F.
,
Bouwstra, S.
,
Amskov, M.
Published in
Journal of intelligent material systems and structures
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Stacking technology for a space constrained microsystem
by
Heschel, M
,
Kuhmann, J F
,
Bouwstra, S
,
Amskov, M
Published in
Journal of intelligent material systems and structures
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Article
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Chip-size-packaged silicon microphones
by
Müllenborn, M.
,
Rombach, P.
,
Klein, U.
,
Rasmussen, K.
,
Kuhmann, J.F.
,
Heschel, M.
,
Gravad, M.Amskov
,
Janting, J.
,
Branebjerg, J.
,
Hoogerwerf, A.C.
,
Bouwstra, S.
Published in
Sensors and actuators. A, Physical
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