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A paired wedge filter system for compensation in dose differences by Kobayashi, Hidetoshi, Sakurai, Yasuo, Kondo, Satoru, Abe, Sinji, Hayakawa, Norikazu, Aoyama, Yuuichi, Obata, Yasunori, Ishigaki, Takeo

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Physical Understanding of Gate-Depletion Phenomena in Poly-Si/HfSiON Stacks Based on C- V Differentiation Analysis by Saitoh, M., Kamimuta, Y., Saito, T., Sekine, K., Kobayashi, T., Aoyama, T., Koyama, M., Nishiyama, A.

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Sub-1A-Resolution Analysis and Physical Understanding of Gate/Insulator Interfacial Region in Scaled-Tinv High-k Gate Stacks by Saitoh, M., Tsuchiya, Y., Kamimuta, Y., Saito, T., Sekine, K., Kobayashi, T., Aoyama, T., Koyama, M., Nishiyama, A.

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