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Uncertainty analysis of slot die coater gap width measurement by using a shear mode micro-probing system
by
Ito, So
,
Chen, Yuan-Liu
,
Shimizu, Yuki
,
Kikuchi, Hirotaka
,
Gao, Wei
,
Takahashi, Kazuhiko
,
Kanayama, Toshihiko
,
Arakawa, Kunmei
,
Hayashi, Atsushi
Published in
Precision engineering
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A Micro-Coordinate Measurement Machine (CMM) for Large-Scale Dimensional Measurement of Micro-Slits
by
Ito, So
,
Kikuchi, Hirotaka
,
Chen, Yuanliu
,
Shimizu, Yuki
,
Gao, Wei
,
Takahashi, Kazuhiko
,
Kanayama, Toshihiko
,
Arakawa, Kunmei
,
Hayashi, Atsushi
Published in
Applied sciences
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