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Thin-Film Deposition With Refractory Materials Using a Vacuum Arc
by
Beilis, Isak I.
,
Koulik, Yosef
,
Yankelevich, Yefim
,
Arbilly, David
,
Boxman, Raymond L.
Published in
IEEE transactions on plasma science
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Thin film deposition using a plasma source with a hot refractory anode vacuum arc
by
Beilis, Isak I.
,
Koulik, Yosef
,
Boxman, Raymond L.
,
Arbilly, David
Published in
Journal of materials science
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Filtered vacuum arc deposition of semiconductor thin films
by
Boxman, R.L.
,
Goldsmith, S.
,
Ben-Shalom, A.
,
Kaplan, L.
,
Arbilly, D.
,
Gidalevich, E.
,
Zhitomirsky, V.
,
Ishaya, A.
,
Keidar, M.
,
Beilis, I.I.
Published in
IEEE transactions on plasma science
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