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Thin film deposition for permeability increase of gas being implanted (theoretical consideration)
by
Iskanderova, ZA
,
Radjabov, TD
,
Arutjunova, EO
,
Rakhimova, GR
Published in
Vacuum
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Condensed Matter: Structure, Mechanical And Thermal Properties
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Defects And Impurities In Crystals; Microstructure
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Doping And Impurity Implantation In Iii-V And Ii-Vi Semiconductors
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