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Fidelity test for through-focus or volumetric type of optical imaging methods
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Attota, Ravi Kiran
Published in
Optics express
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Through-focus or volumetric type of optical imaging methods: a review
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Attota, Ravi Kiran
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Journal of biomedical optics
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Step beyond Kohler illumination analysis for far-field quantitative imaging: angular illumination asymmetry (ANILAS) maps
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Attota, Ravi Kiran
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Optics express
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Parameter optimization for through-focus scanning optical microscopy
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Attota, Ravi Kiran
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Kang, Hyeonggon
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Optics express
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Optical microscope illumination analysis using through-focus scanning optical microscopy
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Attota, Ravi Kiran
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Park, Haesung
Published in
Optics letters
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Enhancing optical microscopy illumination to enable quantitative imaging
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Agocs, Emil
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Attota, Ravi Kiran
Published in
Scientific reports
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Computational Process Control Compatible Dimensional Metrology Tool: Through-focus Scanning Optical Microscopy
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Attota, Ravi Kiran
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Volume determination of irregularly-shaped quasi-spherical nanoparticles
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Attota, Ravi Kiran
,
Liu, Eileen Cherry
Published in
Analytical and bioanalytical chemistry
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Feasibility study on 3-D shape analysis of high-aspect-ratio features using through-focus scanning optical microscopy
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Attota, Ravi Kiran
,
Weck, Peter
,
Kramar, John A
,
Bunday, Benjamin
,
Vartanian, Victor
Published in
Optics express
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Nondestructive shape process monitoring of three-dimensional, high-aspect-ratio targets using through-focus scanning optical microscopy
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Attota, Ravi Kiran
,
Kang, Hyeonggon
,
Scott, Keana
,
Allen, Richard
,
Vladar, Andras E
,
Bunday, Benjamin
Published in
Measurement science & technology
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Detecting nanoscale contamination in semiconductor fabrication using through-focus scanning optical microscopy
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Rim, Min-Ho
,
Agocs, Emil
,
Dixson, Ronald
,
Kavuri, Prem
,
Vladár, András E.
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Attota, Ravi Kiran
Published in
Journal of vacuum science and technology. B, Nanotechnology & microelectronics
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A Better Method for Volume Determination of Regularly and Irregularly Shaped Nanoparticles with Enhanced Accuracy
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Attota, Ravi Kiran
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arXiv.org
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