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Atomic Layer Deposition of Ruthenium and Ruthenium Oxide Using a Zero-Oxidation State Precursor
by
Austin, Dustin Z
,
Jenkins, Melanie A
,
Allman, Derryl
,
Hose, Sallie
,
Price, David
,
Dezelah, Charles L
,
Conley, John F
Published in
Chemistry of materials
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Laminate Al2O3/Ta2O5 Metal/Insulator/Insulator/Metal (MIIM) Devices for High-Voltage Applications
by
Jenkins, Melanie A.
,
Austin, Dustin Z.
,
Holden, Konner E. K.
,
Allman, Derryl
,
Conley, John F.
Published in
IEEE transactions on electron devices
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Correction to Atomic Layer Deposition of Ruthenium and Ruthenium Oxide Using a Zero Oxidation State Precursor
by
Austin, Dustin Z
,
Jenkins, Melanie A
,
Allman, Derryl
,
Hose, Sallie
,
Price, David
,
Dezelah, Charles L
,
Conley, John F
Published in
Chemistry of materials
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Assessment of Energy Barriers Between ZrCuAlNi Amorphous Metal and Atomic Layer Deposition Insulators Using Internal Photoemission Spectroscopy
by
Jenkins, Melanie A.
,
Klarr, Tyler
,
Austin, Dustin Z.
,
Li, Wei
,
Nguyen, Nhan V.
,
Conley, John F.
Published in
Physica status solidi. PSS-RRL. Rapid research letters
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Laminate Al 2 O 3 /Ta 2 O 5 Metal/Insulator/Insulator/Metal (MIIM) Devices for High-Voltage Applications
by
Jenkins, Melanie A.
,
Austin, Dustin Z.
,
Holden, Konner E. K.
,
Allman, Derryl
,
Conley, John F.
Published in
IEEE transactions on electron devices
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Plasma Enhanced Atomic Layer Deposition of Al2O3/SiO2 MIM Capacitors
by
Austin, Dustin Z.
,
Allman, Derryl
,
Price, David
,
Hose, Sallie
,
Conley, John F.
Published in
IEEE electron device letters
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Review-Beyond the Highs and Lows: A Perspective on the Future of Dielectrics Research for Nanoelectronic Devices
by
Jenkins, Melanie
,
Austin, Dustin Z.
,
Conley, John F.
,
Fan, Junqing
,
de Groot, C. H.
,
Jiang, Liudi
,
Fan, Ye
,
Ali, Rizwan
,
Ghosh, Gargi
,
Orlowski, Marius
,
King, Sean W.
Published in
ECS journal of solid state science and technology
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Atomic layer deposition of bismuth oxide using Bi(OCMe2 iPr)3 and H2O
by
Austin, Dustin Z.
,
Allman, Derryl
,
Price, David
,
Hose, Sallie
,
Saly, Mark
,
Conley, John F.
Published in
Journal of vacuum science & technology. A, Vacuum, surfaces, and films
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Atomic layer deposition of bismuth oxide using Bi(OCMe{sub 2}{sup i}Pr){sub 3} and H{sub 2}O
by
Austin, Dustin Z.
,
Conley, John F.
,
Allman, Derryl
,
Price, David
,
Hose, Sallie
,
Saly, Mark
Published in
Journal of vacuum science & technology. A, Vacuum, surfaces, and films
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