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Search Results - BARELLI, Carl
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Batch process for atomic layer deposition of hafnium silicate thin films on 300-mm-diameter silicon substrates
by
Okuyama, Yoshi
,
Barelli, Carl
,
Tousseau, Christopher
,
Park, Seung
,
Senzaki, Yoshihide
Published in
Journal of vacuum science & technology. A, Vacuum, surfaces, and films
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Creating and Using a Consumer Chemical Molecular Graphics Database: The "Molecule of the Day" - A Great Way To Begin Your Lecture
by
Scharberg, Maureen A
,
Cox, Oran E
,
Barelli, Carl A
Published in
Journal of chemical education
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Batch process for atomic layer deposition of hafnium silicate thin filmson 300-mm-diameter silicon substrates
by
Okuyama, Yoshi
,
Barelli, Carl
,
Tousseau, Christopher
,
Park, Seung
,
Senzaki, Yoshihide
Published in
Journal of vacuum science & technology. A, Vacuum, surfaces, and films
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Highly Conformal ALD of ZrO 2 at Higher Process Temperatures than the Conventinal TEMAZr-Based Process
by
Senzaki, Yoshi
,
Okuyama, Yoshi
,
Kim, Gi
,
Kim, H. Y.
,
Barelli, Carl
,
Lindner, Johannes
,
Karim, Zia
,
Ramanathan, Sasangan
Published in
ECS transactions
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Comparison of ALD of HfO2, SiO2, and HfSiOx Thin Films Using Various Metal/Silicon Alkylamide Precursors and O3
by
Bartholomew, Lawrence
,
Barelli, Carl
,
Owyang, Jon
,
DiCarlo, Ron
,
Shenai, Deo
,
Marsman, Charles
,
Senzaki, Yoshi
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ECS transactions
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Atomic layer deposition of high-k thin films for gate and capacitor dielectrics
by
Senzaki, Y.
,
Chatham, H.
,
Park, S.
,
Bartholomew, L.
,
Lo, T.
,
Okuyama, Y.
,
Barelli, C.
,
Tousseau, C.
,
Fleming, T.
,
Ford, B.
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Conference Proceeding
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Single-Wafer Hot Wall Rapid Thermal Processing for Thin Gate Oxide Films
by
Senzaki, Yoshihide
,
Schaefer, Marci
,
Sisson, Joseph
,
Barelli, Carl
,
Bailey, Jeff
,
Herring, Robert
,
Hayn, Regina
Published in
Electrochemical and solid-state letters
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Atomic layer deposition of high-K metal oxides for gate and capacitor dielectrics
by
SENZAKI, Yoshihide
,
PARK, S. G
,
HIGUCHI, Randall
,
CHATHAM, Hood
,
BARTHOLOMEW, Lawrence
,
AL-LAMI, Sattar
,
BARELLI, Carl
,
LEE, Sang-In
,
HELMS, Aubrey JR
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La Ballade irlandaise : (Un oranger) : fox / Marnay (Eddie) & Stern (E.). TILL : slow / Danvers (C.) & Sigman. Je ne peux pas rentrer chez moi : fox / Aznavour (Charles). Si je pou...
by
Stern, Emil (1913-1997). Auteur ou responsable intellectuel
,
Sigman, Carl. Auteur ou responsable intellectuel
,
Marnay, Eddy (1920-2003). Auteur ou responsable intellectuel
,
Bécaud, Gilbert (1927-2001). Auteur ou responsable intellectuel
,
Aznavour, Charles (1924-2018). Auteur ou responsable intellectuel
,
Barelli, Aimé (1917-1995). Direction d'orchestre
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