Search Results - Babahani, O.

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    Monte Carlo Simulation of Chemical Reactions in Plasma Enhanced Chemical Vapor Deposition: from Microscopic View to Macroscopic Results

    Monte Carlo Simulation of Chemical Reactions in Plasma Enhanced Chemical Vapor Deposition: from Microscopic View to Macroscopic Results by Babahani, O., Hadjadj, S., Khelfaoui, F., Kebaili, H. O., Lemkeddem, S.

    Published in SILICON
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