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Electrochemical Palladium Deposition for Reducing Critical Dimensions in Nanostructures
by
Sahin, Asli
,
Huang, Qiang
,
Cotte, John M.
,
Baker-O'Neal, Brett C.
Published in
Journal of the Electrochemical Society
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(Invited) Materials and Processes for Superconducting Qubits and Superconducting Electronic Circuits on 300mm Wafers
by
Papa Rao, Satyavolu S.
,
Hobbs, Christopher
,
Olson, Stephen
,
Foroozani, Neda
,
Chong, Hyuncher
,
Stamper, Harlan
,
Martinick, Brian
,
Ashworth, Dominic
,
Bunday, Benjamin
,
Malloy, Matthew
,
Holland, Eric
,
Nalaskowski, Jakub
,
Kearney, Patrick
,
Ngai, Tat
,
Wells, Ilyssa
,
Yakimov, Michael
,
Oktyabrsky, Serge
,
O'Brien, Brendan
,
Kaushik, Vidya
,
Dunn, Kathleen A
,
Beckmann, Karsten
,
Bennett, Stephen
,
Rodgers, Martin
,
Murray, Thomas
,
Novak, Steven
,
Baker-O'Neal, Brett
,
Borst, Christopher
,
Osborn, Kevin D
,
Liehr, Michael
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Morphology of Electrodeposited Cu on 300 mm PEALD Ru Substrates
by
Kelly, James
,
Vo, Tuan
,
Van der Straten, O.
,
Huang, Qiang
,
Baker O'Neal, Brett
,
Shao, X I.
,
Chiang, Sunny
,
Dukovic, John
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