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Single-crystal silicon micromirror array with polysilicon flexures
by
Kudrle, T.D.
,
Wang, C.C.
,
Bancu, M.G.
,
Hsiao, J.C.
,
Pareek, A.
,
Waelti, M.
,
Kirkos, G.A.
,
Shone, T.
,
Fung, C.D.
,
Mastrangelo, C.H.
Published in
Sensors and actuators. A. Physical.
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Pull-in suppression and torque magnification in parallel plate electrostatic actuators with side electrodes
by
Kudrle, T.D.
,
Shedd, G.M.
,
Wang, C.C.
,
Hsiao, J.C.
,
Bancu, M.G.
,
Kirkos, G.A.
,
Yazdi, N.
,
Waelti, M.
,
Sane, H.
,
Mastrangelo, C.H.
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Conference Proceeding
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Sensors And Actuators. A. Physical.
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Electrodes
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Engineering
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Engineering, Electrical & Electronic
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Instruments & Instrumentation
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Science & Technology
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Technology
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Arrays
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Drying
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Dynamic Range
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Electric Potential
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Electrostatic Actuators
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Etching
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Folded Flexures
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Geometry
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Gimbal
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Micromirror
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Mirrors
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Polysilicon
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Ieee Electronic Library (Iel) Conference Proceedings
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Elsevier Sciencedirect Journals
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Elsevier
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Sciencedirect Physical & Analytical Chemistry Backfile
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Elsevier Sd Backfile Engineering And Technology
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