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Polysilicon Grating Switches for LiDAR
by
Cook, Eugene H.
,
Spector, Steven J.
,
Moebius, Michael G.
,
Baruffi, Frederick A.
,
Bancu, Mirela G.
,
Benney, Lucas D.
,
Byrnes, Steven J.
,
Chesin, Jordan P.
,
Geiger, Sarah J.
,
Goldman, Daniel A.
,
Hare, Alva E.
,
Lane, Benjamin F.
,
Sawyer, William D.
,
Bessette, Chris R.
Published in
Journal of microelectromechanical systems
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Journal Title
Journal Of Microelectromechanical Systems
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Subjects
Arrayed Waveguide Gratings
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Engineering
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Engineering, Electrical & Electronic
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Field Of View
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Focal Plane Devices
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Frames Per Second
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Grating
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Gratings
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Instruments & Instrumentation
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Laser Beams
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Laser Radar
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Lidar
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Mems
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Micro Optics
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Mirrors
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Moems
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Nanoscience & Nanotechnology
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Optical Switches
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Photonics
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Physical Sciences
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Ieee Xplore (Online Service)
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