Tackling residual tensile stress in AlN-on-Si nucleation layers via the controlled Si(111) surface nitridation by Milakhin, Denis, Malin, Timur, Mansurov, Vladimir, Maidebura, Yan, Bashkatov, Dmitriy, Milekhin, Ilya, Goryainov, Sergey, Volodin, Vladimir, Loshkarev, Ivan, Vdovin, Vladimir, Gutakovskii, Anton, Ponomarev, Sergei, Zhuravlev, Konstantin

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