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The impact of plasma enhancement on the deposition of carbon‐containing zirconia films by metalorganic chemical vapor deposition
by
Maaß, Philipp A.
,
Bedarev, Vitali
,
Chauvet, Laura
,
Prenzel, Marina
,
Glauber, Jean‐Pierre
,
Devi, Anjana
,
Böke, Marc
,
Keudell, Achim
Published in
Plasma processes and polymers
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Plasma deposited carbon containing zirconia films as thermal barriers
by
Bedarev, Vitali
,
Maaß, Philipp A.
,
Thewes, Anna
,
Böke, Marc
,
von Keudell, Achim
Published in
Journal of vacuum science & technology. A, Vacuum, surfaces, and films
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Journal Title
Journal Of Vacuum Science & Technology. A, Vacuum, Surfaces, And Films
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Journal Of Vacuum Science & Technology. A. Vacuum, Surfaces, And Films
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Plasma Processes And Polymers
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Subjects
Physical Sciences
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Physics
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Physics, Applied
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Science & Technology
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Carbon
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Crystallization
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Electrical Resistivity
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Materials Science
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Materials Science, Coatings & Films
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Metalorganic Chemical Vapor Deposition
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Mocvd
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Pecvd
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Physics, Condensed Matter
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Physics, Fluids & Plasmas
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Polymer Science
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Precursors
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Technology
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Thermal Barrier Coatings
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Thermal Conductivity
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Thin Films
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Wiley Online Library Journals
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Open Access: Wiley-Blackwell Open Access Journals
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American Institute Of Physics:jisc Collections:transitional Journals Agreement 2021-23 (Reading List)
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Wiley-Blackwell Read & Publish Collection
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Aip Digital Archive
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Aip 美国物理联合会现刊(与Nstl共建)
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