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Thin-film shape-memory alloy actuated micropumps
by
Benard, W.L.
,
Kahn, H.
,
Heuer, A.H.
,
Huff, M.A.
Published in
Journal of microelectromechanical systems
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Modeling a network of MEMS fabrication sites
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Benard, W.L.
,
Huff, M.A.
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A titanium-nickel shape-memory alloy actuated micropump
by
Benard, W.L.
,
Kahn, H.
,
Heuer, A.H.
,
Huff, M.A.
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Journal Of Microelectromechanical Systems
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