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Application of PARAFAC2 to fault detection and diagnosis in semiconductor etch
by
Wise, Barry M.
,
Gallagher, Neal B.
,
Martin, Elaine B.
Published in
Journal of chemometrics
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The GIFI approach to non-linear PLS modeling
by
Berglund, Anders
,
Kettaneh, Nouna
,
Uppgård, Lise-Lott
,
Wold, Svante
,
Bendwell, Nancy
,
Cameron, Dave R.
Published in
Journal of chemometrics
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