Search Results - Berezhnoi, S.V.

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    Semianalytical description of nonlocal secondary electrons in a radio frequency capacitively coupled plasma at intermediate pressures

    Semianalytical description of nonlocal secondary electrons in a radio frequency capacitively coupled plasma at intermediate pressures by Berezhnoi, S.V., Kaganovich, I.D., Misina, M., Bogaerts, A., Gijbels, R.

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