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High Refractive Index Fluid Evaluations at 193 nm: Fluid Lifetime and Fluid/Resist Interaction Studies
by
Tran, Hoang V.
,
Hendrickx, Eric
,
French, Roger H.
,
Adelman, Douglas J.
,
Rogado, Nyrissa S.
,
Kaku, Mureo
,
Mocella, Michael
,
Schmieg, John J.
,
Chen, Charles Y.
,
Roey, Frieda Van
,
Bernfeld, Adams S.
,
Derryberry, Rebekah A.
Published in
Journal of Photopolymer Science and Technology
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High Refractive Index Fluid Evaluations at 193nm: Fluid Lifetime and Fluid/Resist Interaction Studies
by
Tran, Hoang V.
,
Hendrickx, Eric
,
French, Roger H.
,
Adelman, Douglas J.
,
Rogado, Nyrissa S.
,
Kaku, Mureo
,
Mocella, Michael
,
Schmieg, John J.
,
Chen, Charles Y.
,
Roey, Frieda Van
,
Bernfeld, Adams S.
,
Derryberry, Rebekah A.
Published in
Journal of photopolymer science and technology
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High Refractive Index Fluid Evaluations at 193 nm
by
V. Tran, Hoang
,
Hendrickx, Eric
,
H. French, Roger
,
J. Adelman, Douglas
,
S. Rogado, Nyrissa
,
Kaku, Mureo
,
Mocella, Michael
,
J. Schmieg, John
,
Y. Chen, Charles
,
Van Roey, Frieda
,
S. Bernfeld, Adams
,
A. Derryberry, Rebekah
Published in
Journal of photopolymer science and technology
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Base-Line Data in a Carcinogen-Susceptible First-Generation Hybrid Strain of Syrian Golden Hamsters: F1D Alexander
by
Bernfeld, Peter
,
Homburger, F.
,
Adams, Richard A.
,
Soto, Enrique
,
Van Dongen, Cornelis G.
Published in
JNCI : Journal of the National Cancer Institute
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Journal Of Photopolymer Science And Technology
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Absorbance
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Active Recycle
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Defectivity
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Immersion Lithography
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Leaching
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Radiation Durability
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Refractive Index
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Science & Technology
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Second Generation Fluid
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Window Contamination
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