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Laser annealing of double implanted layers for IGBT Power Devices
by
Sabatier, Clement
,
Rack, Simon
,
Beseaucele, Herve
,
Venturini, Julien
,
Hoffmann, Thomas Y.
,
Rosseel, Erik
,
Steenbergen, Johnny
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Annealing
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Boron
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Buffer Layers
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Engineering
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Engineering, Electrical & Electronic
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Insulated Gate Bipolar Transistors
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