Integration challenges for multi-gate devices by Collaert, N., Brus, S., De Keersgieter, A., Dixit, A., Ferain, I., Goodwin, M., Kottantharayil, A., Rooyackers, R., Verheyen, P., Yim, Y., Zimmerman, P., Beckx, S., Degroote, B., Demand, M., Kim, M., Kunnen, E., Locorotondo, S., Mannaert, G., Neuilly, F., Shamiryan, D., Baerts, C., Ercken, M., Laidlcr, D., Leys, F., Loo, R., Lisoni, J., Snow, J., Vos, R., Boullart, W., Pollentier, I., De Gendt, S., De Meyer, K., Jurczak, M., Biescmans, S.

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