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High fidelity TiN processing modes for multi-gate Ge-based quantum devices
by
Bugu, Sinan
,
Biradar, Sheshank
,
Blake, Alan
,
Liu, CheWee
,
Myronovd, Maksym
,
Duffy, Ray
,
Fagas, Giorgos
,
Petkov, Nikolay
Published in
arXiv.org
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