Nanoscale multiply charged focused ion beam platform for surface modification, implantation, and analysis by Lalande, Mathieu, Salou, Pierre, Houel, Arnaud, Been, Thierry, Birou, Thierry, Bourin, Charles, Cassimi, Amine, Keizer, Arthur, Mellier, Jean-Baptiste, Ramillon, Jean-Marc, Sineau, Anthony, Delobbe, Anne, Guillous, Stéphane

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