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COMPARATIVE ANALYSIS FOR THE LOCAL PIEZOELECTRIC PROPERTIES OF ION BEAM AND REACTIVE ION BEAM ETCHED Pb(Zr,Ti)O 3 THIN FILMS
by
Blach-Legrand, C.
,
Saitzek, S.
,
Da Costa, A.
,
Desfeux, R.
,
Soyer, C.
,
Rémiens, D.
Published in
Integrated ferroelectrics
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COMPARATIVE ANALYSIS FOR THE LOCAL PIEZOELECTRIC PROPERTIES OF ION BEAM AND REACTIVE ION BEAM ETCHED Pb(Zr,Ti)O3 THIN FILMS
by
Blach-Legrand, C.
,
Saitzek, S.
,
Da Costa, A.
,
Desfeux, R.
,
Soyer, C.
,
Rémiens, D.
Published in
Integrated ferroelectrics
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Article
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Integrated Ferroelectrics
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Chemical Sciences
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Coercive Voltage
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Domain-Wall Pinning
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Engineering
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Engineering, Electrical & Electronic
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Inert And Reactive Ion Beam Etching
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Local Piezoelectric Hysteresis Loops
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Material Chemistry
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Pbo
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Physical Sciences
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Physics
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Physics, Applied
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Physics, Condensed Matter
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Piezoelectric Activity
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Piezoresponse Force Microscopy
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Science & Technology
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Technology
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Thin Films
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Taylor And Francis Science And Technology Collection
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Ingentaconnect Journals
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