Search Results - Bleau, Jenelle E.

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    Dual source APCVD synthesis of TaN and NbN thin films on glass from the reaction of MCl5 (M = Ta, Nb) and 1,1,1,3,3,3-hexamethyldisilazane

    Dual source APCVD synthesis of TaN and NbN thin films on glass from the reaction of MCl5 (M = Ta, Nb) and 1,1,1,3,3,3-hexamethyldisilazane by NEWPORT, Anne C, BLEAU, Jenelle E, CARMALT, Claire J, PARKIN, Ivan P, O'NEILL, Shane A

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    Molecular precursors for the CVD of niobium and tantalum nitride

    Molecular precursors for the CVD of niobium and tantalum nitride by Bleau, Jenelle E., Carmalt, Claire J., O’Neill, Shane A., Parkin, Ivan P., P. White, Andrew J., Williams, David J.

    Published in Polyhedron
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