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Optimization of oxygen-implanted silicon substrates for CMOS devices by electrical characterization
by
Foster, D.J.
,
Butler, A.L.
,
Bolbot, P.H.
,
Alderman, J.C.
Published in
IEEE transactions on electron devices
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IIB-5 sidewall parasitic suppression in trench-isolated submicrometer CMOS
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Foster, D.J.
,
Roberts, M.C.
,
Bolbot, P.H.
,
Medhurst, P.L.
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IEEE transactions on electron devices
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A Sub-Micron CMOS Process Employing Trench Isolation
by
Roberts, M.C.
,
Bolbot, P.H.
,
Foster, D.J.
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ESSDERC '88: 18th European Solid State Device Research Conference
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A Comparison of Trench Filling Materials for Sub-Micron CMOS
by
Bolbot, P.H.
,
Roberts, M.C.
,
Medhurst, P.L.
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ESSDERC '88: 18th European Solid State Device Research Conference
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