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M-FOUP SYSTEM performance in a semiconductor process control
by
Lifshitz, Yevgeny
,
Alhasawi, Fahad
,
Novack, David
,
Downey, Jack
,
Byrnes, John
,
Hajtman, Alfred
,
Nandor Bitvai, Csaba
,
Bolcskei-Molnar, Anna
,
Nemeth, Istvan
,
Kover, Krisztina
,
Basa, Peter
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Monitoring subwavelength grating structures for vertical-cavity surface-emitting laser applications by spectroscopic ellipsometry
by
Balogh, Emeric
,
Basa, Peter
,
Suto, Attila
,
Powell, Benjamin
,
Bölcskei-Molnár, Anna
,
Biró, Szilvia
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Journal of vacuum science and technology. B, Nanotechnology & microelectronics
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Journal Of Vacuum Science And Technology. B, Nanotechnology & Microelectronics
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Optical Variables Measurement
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American Institute Of Physics:jisc Collections:transitional Journals Agreement 2021-23 (Reading List)
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Aip 美国物理联合会现刊(与Nstl共建)
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