Search Results - Borucki, L.J

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  1. 1
    A new investigation of copper's role in enhancing Al–Cu interconnect electromigration resistance from an atomistic view

    A new investigation of copper's role in enhancing Al–Cu interconnect electromigration resistance from an atomistic view by Liu, X.-Y, Liu, C.-L, Borucki, L.J

    Published in Acta materialia
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  2. 2
    Fluid Pressures and Pad Topography in Chemical Mechanical Polishing

    Fluid Pressures and Pad Topography in Chemical Mechanical Polishing by Borucki, Leonard J., Ng, Sum Huan, Danyluk, Steven

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  3. 3
    Deposition and etch processes: continuum film evolution in microelectronics

    Deposition and etch processes: continuum film evolution in microelectronics by Cale, T.S., Rogers, B.R., Merchant, T.P., Borucki, L.J.

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  4. 4
    Evidence and modeling of anomalous low concentration arsenic inactivation

    Evidence and modeling of anomalous low concentration arsenic inactivation by Borucki, L.J.

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