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Via resistance increase accelerated by thermal stress
by
Qin, Wentao
,
Donaldson, Scott
,
Rogers, Dan
,
Belisle, Chuck
,
Grivna, Gordy
,
Boukhanfra, Lahcen
,
Thiefain, Julien
,
Barrientos, Denise
,
Steinwall, Jim
,
Chang, George
,
Gambino, Jeff
,
Burgin, Rebecca
Published in
Microelectronics and reliability
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Physical and Electrical Characterization of Deep Trench Isolation in Bulk Silicon and SOI Substrates
by
Agam, Moshe
,
Jerome, Rick
,
Boukhanfra, Lahcen
,
Eda, Masaichi
,
Su, Lan
,
Hose, Sallie
,
Bates, Kenn
,
Janssens, Johan
,
Pjencak, Jaroslav
,
Chen, Weize
,
Long, Thomas
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