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Polishing of Sidewall Surfaces Using a Gas Cluster Ion Beam
by
Bourelle, Emmanuel
,
Suzuki, Akiko
,
Sato, Akinobu
,
Seki, Toshio
,
Matsuo, Jiro
Published in
Japanese Journal of Applied Physics
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Sidewall polishing with a gas cluster ion beam for photonic device applications
by
Bourelle, Emmanuel
,
Suzuki, Akiko
,
Sato, Akinobu
,
Seki, Toshio
,
Matsuo, Jiro
Published in
Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms
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STM study on surfaces of HOPG modified by implantation and heat treatment
by
Bourelle, Emmanuel
,
Tanabe, Yasuhiro
,
Yasuda, Eiichi
,
Kimura, Shiushichi
Published in
Carbon (New York)
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Journal Title
Carbon
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Japanese Journal Of Applied Physics
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Japanese Journal Of Applied Physics Part 2-Letters & Express Letters
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Japanese Journal Of Applied Physics, Part 2: Letters
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Japanese Journal Of Applied Physics. Pt. 2, Letters & Express Letters
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Nuclear Instruments & Methods In Physics Research Section B-Beam Interactions With Materials And Atoms
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Nuclear Instruments & Methods In Physics Research. Section B, Beam Interactions With Materials And Atoms
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Subjects
Physical Sciences
3 results
3
Physics
3 results
3
Science & Technology
3 results
3
Gas Cluster Ion Beam
2 results
2
Polishing
2 results
2
Technology
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2
A. Highly Oriented Graphite
1 results
1
Angled Irradiation
1 results
1
B. Heat Treatment
1 results
1
C. Scanning Tunneling Microscopy
1 results
1
Chemistry
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1
Chemistry, Physical
1 results
1
Condensed Matter: Structure, Mechanical And Thermal Properties
1 results
1
D. Defects
1 results
1
Defects And Impurities In Crystals; Microstructure
1 results
1
Doping And Impurity Implantation In Other Materials
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1
Electron, Ion, And Scanning Probe Microscopy
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Exact Sciences And Technology
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1
Implantation
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Instruments & Instrumentation
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Year of Publication
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Sciencedirect - Connect Here First To Enable Access
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2
Sciencedirect Freedom Collection 2022-2024
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2
Institute Of Physics Iopscience Extra
1 results
1
Backfile Package - Materials Science [Yms]
1 results
1