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Design and Fabrication Issues of a Silicon-Based Vibration Powered Electric Energy Generator Using Parallel Plate and In-Plane Mechanism
by
Paracha, A.M.
,
Basset, P.
,
Lim, C.L.P.
,
Marty, F.
,
Poulichet, P.
,
Amendola, G.
,
Bourounia, T.
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Capacitance
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Capacitors
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Damping
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Electrodes
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Electrostatics
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Ieee Electronic Library (Iel) Conference Proceedings
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