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On the use of dielectric films in temperature measurements: application to the realization of capacitive thermometers for temperatures <5 K
by
Boutard-Gabillet, D
,
Aranda, P
,
Ladieu, F
,
Pari, P
,
Rotter, M
Published in
Journal of non-crystalline solids
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Pressure and power dependence of self-bias, sheath thickness, and deposition rate in confined methane plasmas at 13.56 MHz
by
Hytry, R.
,
Boutard-Gabillet, D.
Published in
Applied physics letters
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Aip 美国物理联合会现刊(与Nstl共建)
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