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Effect of helium-ion implantation on 3 C -SiC nanomechanical string resonators
by
Bredol, Philipp
,
David, Felix
,
Jagtap, Nagesh S.
,
Klaß, Yannick S.
,
Astakhov, Georgy V.
,
Erbe, Artur
,
Weig, Eva M.
Published in
Physical review applied
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Effect of Helium Ion Implantation on 3C-SiC Nanomechanical String Resonators
by
Bredol, Philipp
,
Felix, David
,
Jagtap, Nagesh S
,
Yannick S Kla\ss
,
Astakhov, Georgy V
,
Erbe, Artur
,
Weig, Eva M
Published in
arXiv.org
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Arxiv
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Arxiv.org
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Physical Review Applied
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Beam Theory
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Crystal Defects
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Crystal Lattices
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Damping
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Euler-Bernoulli Beams
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Helium Ions
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Hybrid Systems
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Ion Implantation
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Mechanical Properties
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Mechanical Systems
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Modulus Of Elasticity
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Physics - Mesoscale And Nanoscale Physics
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Point Defects
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Resonators
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Silicon Carbide
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Silicon Substrates
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Strings
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Tensile Stress
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