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Experimental and modeling study of the sputtered particle transport in an r.f. magnetron discharge
by
Clénet, F.
,
Briaud, Ph
,
Lempérière, G.
,
Turban, G.
Published in
Thin solid films
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Experimental study of an RF magnetron discharge for thin-film deposition
by
Clénet, F
,
Briaud, Ph
,
Turban, G
Published in
Surface & coatings technology
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Surface & Coatings Technology
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Thin Solid Films
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Cross-Disciplinary Physics: Materials Science; Rheology
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Deposition By Sputtering
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Exact Sciences And Technology
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Materials Science
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Materials Science, Coatings & Films
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Methods Of Deposition Of Films And Coatings; Film Growth And Epitaxy
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Sputtering
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Deposition
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Electronic, Optical And Magnetic Materials
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Materials Science, Multidisciplinary
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Metals And Alloys
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Optical Emission Spectroscopy
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Physics Of Gases, Plasmas And Electric Discharges
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Sciencedirect Journals
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Elsevier
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Backfile Package - Materials Science [Yms]
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Backfile Package - Physics General (Legacy) [Ypa]
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