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Fs-laser processing of polydimethylsiloxane
by
Atanasov, Petar A.
,
Nedyalkov, Nikolay N.
,
Valova, Eugenia I.
,
Georgieva, Zhenya S.
,
Armyanov, Stefan A.
,
Kolev, Konstantin N.
,
Amoruso, Salvatore
,
Wang, Xuan
,
Bruzzese, Ricardo
,
Sawczak, Miroslaw
,
Śliwiński, Gerard
Published in
Journal of applied physics
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Journal Of Applied Physics
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Applied Physics
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Condensed Matter Physics, Superconductivity And Superfluidity
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Excitation
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Femtosecond Pulses
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Laser Processing
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Laser Radiation
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Lasers
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Mems
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Metallizing
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Microelectromechanical Systems
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Morphology
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Nanoelectromechanical Systems
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Nanosecond Pulses
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Nanostructures
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Optical Microscopy
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Organic Chemistry
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Physical Sciences
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Physics
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Physics, Applied
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Polydimethylsiloxane
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