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A novel optical waveguide microcantilever sensor for the detection of nanomechanical forces
by
Zinoviev, K.
,
Dominguez, C.
,
Plaza, J.A.
,
Busto, V.J.C.
,
Lechuga, L.M.
Published in
Journal of lightwave technology
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Journal Of Lightwave Technology
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Applied Sciences
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Atomic Force Microscopy
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Beam-Propagation Method
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Deflection
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Electric, Optical And Optoelectronic Circuits
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Integrated Optics. Optical Fibers And Wave Guides
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Microcantilevers
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Microoptoelectromechanical System
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Modulation, Demodulation
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