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Structural and optical properties of a-SiOx:H thin films deposited by the GJ EBP CVD method
by
Baranov, Evgeniy
,
Khmel, Sergey
,
Zamchiy, Alexandr
,
Buyko, Maxim
Published in
Physica status solidi. A, Applications and materials science
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Structural and optical properties of a-SiO sub(x):H thin films deposited by the GJ EBP CVD method
by
Baranov, Evgeniy
,
Khmel, Sergey
,
Zamchiy, Alexandr
,
Buyko, Maxim
Published in
Physica status solidi. A, Applications and materials science
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Structural and optical properties of a‐SiO x :H thin films deposited by the GJ EBP CVD method
by
Baranov, Evgeniy
,
Khmel, Sergey
,
Zamchiy, Alexandr
,
Buyko, Maxim
Published in
Physica status solidi. A, Applications and materials science
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Physica Status Solidi. A, Applications And Materials Science
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Chemical Vapor Deposition
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2
Thin Films
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2
Electron Beam Plasma
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1
Energy Gaps
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Fourier Transform Infrared Spectroscopy
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Materials Science
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Materials Science, Multidisciplinary
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Optical Properties
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Oxygen
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Physical Sciences
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Physics
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Physics, Applied
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Physics, Condensed Matter
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Refraction
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Science & Technology
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Silicon Suboxide
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Silicon Substrates
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Spectra
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Supersonic Jets
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Technology
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Wiley Blackwell Journals
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Wiley
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