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Direct nitridation of a silicon surface by multipulse excimer laser irradiation in a nitrogen-containing ambient gas
by
MIHAILESCU, I. N
,
CARCIUN, V
,
GANATSIOS, S
,
ZEMEK, J
,
NISTOR, L. C
,
TEODORESCU, V. S
,
D'ANNA, E
,
LEGGIERI, G
,
LUCHES, A
,
MARTINO, M
,
PERRONE, A
,
DRIGO, A. V
Published in
Journal of applied physics
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Through-wafer copper electroplating for three-dimensional interconnects
by
Nguyen, N T
,
Boellaard, E
,
Pham, N P
,
Kutchoukov, V G
,
Craciun, G
,
Sarro, P M
Published in
Journal of micromechanics and microengineering
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Journal Of Applied Physics
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Journal Of Micromechanics And Microengineering
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Exact Sciences And Technology
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Physics
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Anisotropy
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Condensed Matter: Structure, Mechanical And Thermal Properties
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Copper
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Electronics
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Electroplating
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Engineering
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Engineering, Electrical & Electronic
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Mechanical Engineering. Machine Design
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Mechanical Instruments, Equipment And Techniques
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Microelectronic Fabrication
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Micromechanical Devices And Systems
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Nanoscience & Nanotechnology
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Institute Of Physics:jisc Collections:iop Publishing Journal Archive 1874-1998 (Access Period 2020 To 2024)
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American Institute Of Physics:jisc Collections:transitional Journals Agreement 2021-23 (Reading List)
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Institute Of Physics:jisc Collections:iop Publishing Read And Publish 2024-2025 (Reading List)
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Aip Digital Archive
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Institute Of Physics Iopscience Extra
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American Institute Of Physics (Aip) Publications
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