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Deposition of nanocrystalline diamond films in pulsed Ar/H2/CH4 microwave discharges
by
MONEGER, D
,
BENEDIC, F
,
AZOUANI, R
,
CHELIBANE, F
,
SYLL, O
,
SILVA, F
,
GICQUEL, A
Published in
Diamond and related materials
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Deposition of nanocrystalline diamond films in pulsed Ar/H 2/CH 4 microwave discharges
by
Monéger, D.
,
Bénédic, F.
,
Azouani, R.
,
Chelibane, F.
,
Syll, O.
,
Silva, F.
,
Gicquel, A.
Published in
Diamond and related materials
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Diamond And Related Materials
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Diamond Film
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Nanocrystalline
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Plasma Cvd
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Pulsed Mode
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Condensed Matter: Structure, Mechanical And Thermal Properties
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Cross-Disciplinary Physics: Materials Science; Rheology
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Electrical And Electronic Engineering
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Electronic, Optical And Magnetic Materials
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Exact Sciences And Technology
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Fullerenes And Related Materials; Diamonds, Graphite
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General Chemistry
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Materials Chemistry
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Materials Science
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Mechanical Engineering
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Methods Of Deposition Of Films And Coatings; Film Growth And Epitaxy
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Nanoscale Materials And Structures: Fabrication And Characterization
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Other Topics In Nanoscale Materials And Structures
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Physics
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Specific Materials
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Structure And Morphology; Thickness
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Sciencedirect
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Backfile Package - Materials Science [Yms]
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